MEMS Materials and Processes Handbook

This comprehensive reference on materials, properties, and specific processes for MEMS fabrication includes a "Material Selection Guide" and a "Material Database". The "Processes" section catalogs microfabrication processes, with examples of common uses.

MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also:
Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS
Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques
Provides the reader with a quick check list of the advantage/disadvantage of fabrication
MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.