Vacuum Physics and Techniques covers all of the important topics in modern vacuum physics and will enable the reader to understand the problems associated with vacuum system design, pressure measurement, etc. Students, engineers and researchers entering the area will find this book an excellent introduction to modern vacuum physics and current practice.
Inhaltsverzeichnis
Preface. Some aspects of kinetic theory. Flow of gases through tubes and orifices. Physisorption, chemisorption and other surface effects. Vacuum pumps: the physical principles. Pressure measurement. Vacuum system design. Construction accessories and materials. Leak detection. Vacuum systems in practice. Appendices. Further reading. Index.