Scanning Electron Microscopy

The aim of this book is to outline the physics of image formation, electron­ specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron­ specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec­ tron beam can be blanked at high frequencies for time-resolving exper­ iments and what problems have tobe taken into account when focusing.

1. Introduction. - 2. Electron Optics of a Scanning Electron Microscope. - 3. Electron Scattering and Diffusion. - 4. Emission of Electrons and X-Ray Quanta. - 5. Detectors and Signal Processing. - 6. Imaging with Secondary and Backscattered Electrons. - 7. Electron-Beam-Induced Current, Cathodoluminescence and Special Techniques. - 8. Crystal Structure Analysis by Diffraction. - 9. Elemental Analysis and Imaging with X-Rays. - References.