Scanning Electron Microscopy

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Electron Optics of a Scanning Electron Microscope. - Electron Scattering and Diffusion. - Emission of Backscattered and Secondary Electrons. - Electron Detectors and Spectrometers. - Image Contrast and Signal Processing. - Electron-Beam-Induced Current and Cathodoluminescence. - Special Techniques in SEM. - Crystal Structure Analysis by Diffraction. - Elemental Analysis and Imaging with X-Rays.