Sharpen your understanding of microelectro-mechanical microwave systems with this comprehensive volume explaining the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book's unique presentation integrates circuit fabrication technology, device design-oriented materials, mechanical and microwave considerations, and RF/microwave electronics.
Inhaltsverzeichnis
Microelectromechanical systems - MEMS origins; MEMS impetus/motivation; MEMS fabrication technologies; fundamental MEMS device physics - actuation; fundamental MEMS devices - the cantilever beam; microwave MEMS applications - MEM switch design considerations; the micromachined transmission line; MEMS-based microwave circuits and systems.
